GovDeals is an Online Auction for Government Surplus - QAL#6794-4259, Auction Ends 9/6/2023.

To see full details, additional photos and current bid, please use this link - https://govdeals.bid/45yF4G9

The University of Washington Surplus Property program is pleased to offer this Chemical Mechanical Polisher

System: Strasbaugh 6EC With Accessories.

Rebuilt by Axus technologies in 2015.

There is currently a water leak in the head quill that Axus is able to repair, but before this it was performing consistently.

Approximate dimensions & weight of this equipment: 51"L x 48"W x 72.5"H, Around 1700 lbs.

Accessories: - 2x slurry tanks each one 30" diam. x 40" height, on casters.

- 2x spare platens (plus 1 installed) - 7 extra polishing pads

Key components and features:

- Chemical-mechanical planarization, current hardware for 4" wafers

- Designed for use as a research and development tool to easily develop a refined polishing process

- Composed of three major mechanical components: Polishing table (temp controlled, solid aluminum table belt

- driven with 5 hp electric motor), polishing overarm (provides oscillating motion, down force, and handling for wafer and wafer carrier), and load/unload station (convenient, reliable location to manually load, clean, and unload wafers).

- Slurry tanks allow safe control and dispensing of polishing slurry

Equipment is sold as-is, where-is.

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